atlas id	20220170200022
date (dd/mm/yyyy)	9/4/2001
"process (initial,postTC,postLT)"	postLT
max z error [um]	46.8 
max z error upper [um]	46.8 
max z error lower [um]	-40.4 
minimal max z error [um]	17.3 
minimal max z error s1 [um]	17.3 
minimal max z error s2 [um]	9.8 
minimal max z error s3 [um]	-11.5 
minimal max z error s4 [um]	1.0 
minimal rms z error [um]	3.9 
minimal rms z error s1 [um]	4.4 
minimal rms z error s2 [um]	2.4 
minimal rms z error s3 [um]	4.7 
minimal rms z error s4 [um]	3.5 
left a	0.000475194				
left b	0.000366658				
left c	0.447031781				
right a	-0.001300021				
right b	0.000196258				
right c	0.488180845				

Raw data [mm]					
Reference	bottom facing				
FarTop	0	15	30	45	60
0	0.9900 	1.0222 	1.0451 	1.0577 	1.0624 
15	1.0090 	1.0396 	1.0567 	1.0698 	1.0752 
30	1.0234 	1.0495 	1.0619 	1.0739 	1.0754 
45	1.0298 	1.0571 	1.0679 	1.0747 	1.0818 
60	1.0278 	1.0534 	1.0668 	1.0718 	1.0773 
NearTop	0	15	30	45	60
0	1.0601 	1.0453 	1.0305 	1.0022 	0.9662 
15	1.0747 	1.0566 	1.0385 	1.0146 	0.9805 
30	1.0787 	1.0623 	1.0459 	1.0239 	0.9887 
45	1.0803 	1.0648 	1.0492 	1.0258 	0.9894 
60	1.0779 	1.0621 	1.0464 	1.0193 	0.9839 
FarBottom	0	15	30	45	60
0	-0.1054 	-0.1202 	-0.1212 	-0.1126 	-0.0972 
15	-0.1134 	-0.1271 	-0.1264 	-0.1176 	-0.1041 
30	-0.1103 	-0.1229 	-0.1208 	-0.1156 	-0.0989 
45	-0.0943 	-0.1101 	-0.1148 	-0.1119 	-0.1017 
60	-0.0704 	-0.0898 	-0.1006 	-0.1041 	-0.0950 
NearBottom	0	15	30	45	60
0	-0.0972 	-0.1192 	-0.1412 	-0.1484 	-0.1463 
15	-0.1077 	-0.1274 	-0.1471 	-0.1547 	-0.1540 
30	-0.0969 	-0.1213 	-0.1457 	-0.1554 	-0.1542 
45	-0.1004 	-0.1201 	-0.1399 	-0.1482 	-0.1488 
60	-0.0961 	-0.1152 	-0.1343 	-0.1413 	-0.1391