6/8/2003	from	Hamamatsu	to	KEK
20220170200522
20220170200543
20220170200544
20220170200545
20220170200546
20220170200547
20220170200548
20220170200549
20220170200550

NG:
20220170200523 <- S3 damaged in dropping module
20220170200557 <- Sensor scratched by bonding tool